Mathematical model for outgassing and contamination

dc.contributor.authorShillor, Meir
dc.date.accessioned2016-03-30T15:40:38Z
dc.date.available2016-03-30T15:40:38Z
dc.date.issued1991-10
dc.description.abstractA model for the mathematical description of the processes of outgassing and contamination in a vacuum system is proposed. The underlying assumptions are diffusion in the source, convection and diffusion in the cavity, mass transfer across the source-cavity interface, and a generalization of the Langmuir isotherm for the sorption kinetics on the target. Three approximations are considered where the asymptotic behavior of the model for large time is shown as well as the dependence and sensitivity of the model on some of the parameters. Some numerical examples of the full model are then presented together with a proof of the uniqueness of the solution.en_US
dc.identifier.citationFang, W., Shillor, M., Stahel, E., Epstein, E., Ly, C., McNiel, J., & Zaron, E. (1991). A mathematical model for outgassing and contamination. SIAM Journal on Applied Mathematics, 51(5), 1327-1355.en_US
dc.identifier.issn0036-1399
dc.identifier.urihttp://hdl.handle.net/10323/4215
dc.language.isoen_USen_US
dc.subjectOutgassingen_US
dc.subjectContaminationen_US
dc.subjectConvection-diffusionen_US
dc.subjectGeneralized Langmuir conditionsen_US
dc.subjectSorption kineticsen_US
dc.titleMathematical model for outgassing and contaminationen_US
dc.typeArticleen_US

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